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Multi channel chillers

Dual channel chiller or Three channel chiller for semiconductor industry

Temp range -45℃~90℃ Temp accuracy ±0.1℃

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LNEYA® Multi channel chillers characteristics

  • There are two or more channels with the same/different specifications in one housing;
  • The temperature of two fluid channel systems can be controlled separately by one host;
  • One power supply system realizes the temperature control of 2 channels, reducing the wiring work time;
  • By controlling the variable frequency compressor, variable frequency fan, and electronic expansion valve at the same time, it can still maintain good temperature stability when the heat load fluctuates;
  • Use a pump without mechanical seal. There is no need to regularly check the pump for leakage and replace the mechanical seal.

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FLTZ multi channel chiller can realize multi-channel independent temperature control. We can set the same or different temperature range, heat transfer medium flow rate, etc. for each channel according to your needs.

The channels do not affect each other. Even if one channel fails, it will not affect the operation of other channels.
LNEYA is a leading manufacturer of multi channel chillers in China, specializing in precise temperature control (±0.1℃). Since 2010, we have been a trusted chiller supplier for companies across various industries.  

Multi channel chillers Video

Our FLTZ multi channel chiller lineup includes standard dual-channel and three-channel models. For specialized applications, we offer custom solutions tailored to your specific needs, including channel count, control parameters, and equipment size.  

Contact our industrial chiller sales team to request a standard product catalog or customize a process chiller.

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FLTZ 5℃~90℃
Process Chillers

Cooling capacity 6kW~40kW
Cooling water flow 1.5m³/h~9m³/h
Temp accuracy ±0.05℃

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FLTZ -25℃～90℃
Thermal Chillers

Cooling capacity 2kW~15kW
Cooling water flow 1.2m³/h~10.2m³/h
Temp accuracy ±0.05℃

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FLTZ -45℃～90℃
Low Temperature Chillers

Cooling capacity 1kW~8kW
Cooling water flow 1.5m³/h~8m³/h
Temp accuracy ±0.05℃

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FLTZ -80℃～+90℃
Recirculating Water Chillers

Cooling capacity 0.6kW~3kW
Cooling water flow 1.8m³/h~6m³/h
Temp accuracy ±0.05℃

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FLTZ -100℃～+90℃
Recirculation Chiller

Cooling capacity 1.5kW~3kW
Cooling water flow 50L/min~100L/min 2bar~7bar
Temp accuracy ±0.05℃

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Model FLTZ-203W-2T
Pipeline channel 1 channel 2
Temperature range -20℃～+90℃ -20℃～+90℃
Cooling capacity ±0.1℃（Customizable temperature control accuracy of ±0.01°C.）
Heating capacity 4kW@-10℃ 4kW@-10℃
Heat conducting medium flow rate 2kW 2kW
Heat conducting medium connection size 20L/min 0.5MPa 20L/min 0.5MPa
Heat transfer interface ZG3/4 ZG3/4
Ambient temperature 10～35℃ 10～35℃
Ambient humidity 30～70% 30～70%
Cooling water temperature 15～20℃ 15～20℃
Cooling water flow rate 20L/min 20L/min
Weight 400kg
Dimension cm 50*90*160
Model FLTZ-406W/ETCU-015W
Pipeline channel 1 channel 2
Temperature range -45℃～+40℃ +10℃～+80℃
Cooling capacity ±0.1℃（Customizable temperature control accuracy of ±0.01°C.）
Heating capacity 11kW@-20℃
5kW@-40℃		 13kW@+10℃
Heat conducting medium flow rate 2kW 6kW
Heat conducting medium connection size 17L/min 0.7MPa 17L/min 0.7MPa
Heat transfer interface ZG3/4 ZG3/4
Ambient temperature 10～35℃ 10～35℃
Ambient humidity 30～70% 30～70%
Cooling water temperature 15～20℃ 15～20℃
Cooling water flow rate 40L/min 20L/min
Weight 550kg
Dimension cm 60*100*185
Model FLTZ-203W/2T dual system FLTZ-305W/2T  dual system FLTZ-406W/2T dual system
Temperature range -20℃~90℃  -30℃~90℃ -45℃~90℃
Temperature control accuracy ±0.1℃（Customizable temperature control accuracy of ±0.01°C.）
Heat conducting medium flow rate 15~45l/min 6bar max
Heating capacity 2.5kW 2.5kW 2.5kW 2.5kW 3.5kW 3.5kW
Cooling capacity 3kW @-15℃ 3kW @-15℃ 5kW @-15℃ 5kW @-15℃ 2.5kW @ -35℃ 2.5kW @ -35℃
Internal circulation fluid volume 5L 5L 8L 8L 8L 8L
Cooling water interface 50L/min at20℃ 600L/min at20℃ 50L/min at20℃

Learn more Dual Channel Chillers
Model FLTZ-203W/ETCU-008W
Pipeline channel 1 channel 2 channel 3
Temperature range -10℃～+60℃ +30℃～+80℃ -10℃～+80℃
Temperature stability ±0.1℃（Customizable temperature control accuracy of ±0.01°C.）
Cooling capacity 4kW@-10℃/21kW@+20℃ 6 kW@+30℃ 3kW@-10℃
Heating capacity 4kW 4.5+6kW 3kW
Heat conducting medium flow rate 17L/min 0.7MPa 17L/min 0.7MPa 17L/min 0.7MPa
Heat conducting medium connection size ZG3/4 ZG3/4 ZG3/4
Ambient temperature 10～35 ℃ 10～35 ℃ 10～35 ℃
Ambient humidity 30～70% 30～70% 30～70%
Cooling water flow rate 15～20℃ 15～20℃ 15～20℃
Cooling water temperature 30L/min@15~20℃ 15L/min@15~20℃ 15L/min@15~20℃
Circuit breaker 100A
Weight 600kg
Dimension cm 60*100*170
Model FLT-215W/ETCU-015W/ETCU-008W
Pipeline channel 1 channel 2 channel 3
Temperature range -20℃～+50℃ +30℃～+100℃ +30℃～+40℃
Temperature stability ±0.1℃（Customizable temperature control accuracy of ±0.01°C.）
Cooling capacity 15kW@-10℃ 13kW@PCW+15℃ 8kW@PCW+10℃
Heating capacity 2kW 6kW Pump Heat Loss
Heat conducting medium flow rate 30L/min 0.85MPa 30L/min 0.85MPa 20L/min 0.8MPa
Heat conducting medium connection size ZG3/4 ZG3/4 ZG3/4
Ambient temperature 10～35 ℃ 10～35 ℃ 10～35 ℃
Ambient humidity 30～70% 30～70% 30～70%
Cooling water flow rate 15～20℃ 15～20℃ 15～20℃
Cooling water temperature 30L/min@15~20℃ 15L/min@15~20℃ 15L/min@15~20℃
Circuit breaker 75A
Weight 600kg
Dimension cm 60*100*170
Learn more Triple Channel Chillers

Multi-channel Chiller‘s Applications

FLTZ multi-channel chillers are widely used in the semiconductor industry due to their advantages such as precise temperature control, independent circuit management, and rapid cooling. The application scenarios of semiconductor chillers include wafer manufacturing, packaging testing, photolithography, etching, CVD/PVD deposition, cleaning processes, etc.

Ion implantation

The high-energy particle beam generated during ion implantation can cause local high temperatures. The process chiller can quickly remove heat to prevent thermal damage to the wafer.

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Etching

During plasma etching (RIE, ICP, etc.), the chamber and electrodes need to be strictly temperature controlled to ensure etching uniformity. The chiller can provide a stable temperature environment for etching equipment and reduce process deviations

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Chip packaging

In the packaging process of BGA, CSP, FCBGA, etc., the temperature control of welding and packaging materials affects reliability

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PVD/CVD

CVD (such as LPCVD, PECVD) and PVD (such as sputtering coating) are used for thin film deposition, and the temperature control of the chamber and substrate affects the quality of the film.

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Photolithography

The exposure system, optical lenses, laser light sources, and mask plates of the photolithography machine require precise temperature control to ensure pattern accuracy.

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Wet cleaning

Used to help maintain deionized water within a specific temperature range to remove photoresist residues, metal contamination and particulate matter.

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Why do you need FLTZ multi channel chillers?

If you need independent temperature control for multiple different equipment or processes, and don’t want to buy multiple independent chillers, then FLTZ multi-channel chillers are a very ideal choice.

  • ✔ Need to cool multiple different equipment or processes at the same time.
  • ✔ Need to realize independent temperature control of different channels.
  • ✔ Need to reduce the cost of purchasing equipment.
  • ✔ Need to save space occupied by equipment.
  • ✔ Need to reduce the operating energy consumption of the chiller.
  • ✔ Need a smarter and centralized management method.
  • ✔ Need higher system stability and reliability.

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Why Choose LNEYA®?

 

With the help of the Internet, we have built a global consulting, sales and service network. We have served more than 30,000 customers worldwide and have more than 90 patents.

Our chillers have been selected by more than 100 university laboratory projects around the world and exported to more than 20 countries. We have agents in various European countries and regions such as Singapore, Malaysia, Japan, South Korea, Qatar, Middle Eastern countries, Australia, the Netherlands, Spain and the United States.

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If LNEYA® multi channel chillers do not meet your application

we can tailor a suitable solution for you.

We can customize it for you. For example, cooling capacity, power supply, size
We can customize the voltage and phase of the chiller according to your needs.

Generally, our multi-channel water dispenser for you includes two types: dual channel and triple channel,
If you have other channel requirements, you can contact us for customization.

LNEYA not only provides temperature control systems for semiconductor chillers, but also offers gas coolers for testing in downstream processes, and even provides temperature chambers.

Contact LNEYA®

Submit your request to us and we will contact you within 24 hours

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Email Address

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