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Semicnductor multi-channel chiller
FLTZ 30℃~100℃- Precisione della temperatura±0.1℃
- RefrigentR404A
- Controllo del flusso25~75/min 6bar max
- Gamma di potenza380V 3kW~17kW
Controllo della temperatura nei processi di produzione e test dei semiconduttori
Il metodo di riscaldamento entro 40 ℃ adotta un compressore per il riscaldamento a gas caldo completamente chiuso e la macchina funziona ininterrottamente per 24 ore.
Garantire la stabilità e l'affidabilità del flusso complessivo del processo dei semiconduttori, dal front-end al back-end.
Utilizzato principalmente per il controllo preciso della temperatura nei processi di produzione e collaudo dei semiconduttori, riscaldando entro i 40°C con il metodo di riscaldamento a gas caldo del compressore.
Dettagli sulla configurazione
| Modello | FLTZ-203W-2T | |
| Pipeline | Channel 1 | Channel 2 |
| Intervallo di temperatura | -20℃～+90℃ | -20℃~～90℃ |
| Precisione del controllo della temperatura | ±0.1℃ | ±0.1℃ |
| Capacità di raffreddamento | 4kW@-10℃ | 4kW@-10℃ |
| Heating capacity | 2kW | 2kW |
| Heat transfer medium flow | 20L/min@0.5MPa | 20L/min@0.5MPa |
| Heat transfer medium interface | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35℃ | 10～35℃ |
| Ambient humidity | 30～70% | 30～70% |
| Temperatura dell'acqua di raffreddamento | 15～20℃ | 15～20℃ |
| Cooling water flow | 20L/min | 20L/min |
| Circuit breaker | 30A | |
| Process temperature control | Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm | |
| Peso | 400 kg | |
| Dimensions | 500*900*1600 | |
| Modello | FLTZ-406W/ETCU-015W | |
| Pipeline | Channel 1 | Channel 2 |
| Intervallo di temperatura | -45℃～+40℃ | +10℃～+80℃ |
| Precisione del controllo della temperatura | ±0.1℃ | ±0.1℃ |
| Capacità di raffreddamento | 11kW@-20℃ 5kW@-40℃ |
13kW@+10℃ |
| Heating capacity | 2kW | 6kW |
| Heat transfer medium flow | 17L/min@0.7MPa | 17L/min@0.7MPa |
| Heat transfer medium interface | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35℃ | 10～35℃ |
| Ambient humidity | 30～70% | 30～70% |
| Temperatura dell'acqua di raffreddamento | 15～20℃ | 15～20℃ |
| Cooling water flow | 40L/min | 20L/min |
| Circuit breaker | 80A | |
| Process temperature control | Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm | |
| Peso | 550kg | |
| Dimensions | 600*1000*1850 | |
| Modello | FLTZ-203W/ETCU-008W/FLTZ-203W | ||
| Pipeline | Channel 1 | Channel 2 | Channel 3 |
| Intervallo di temperatura | -10℃～+60℃ | +30℃～+80℃ | -10℃～+80℃ |
| Precisione del controllo della temperatura | ±0.1℃ | ±0.1℃ | ±0.1℃ |
| Capacità di raffreddamento | 4kW@-10℃/21kW@+20℃ | 6 kW@+30℃ | 3kW@-10℃ |
| Heating capacity | 4kW | 4.5+6kW | 3kW |
| Heat transfer medium flow | 17L/min@0.7MPa | 17L/min@0.7MPa | 17L/min@0.7MPa |
| Heat transfer medium interface | ZG3/4 | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35 ℃ | 10～35 ℃ | 10～35 ℃ |
| Ambient humidity | 30～70% | 30～70% | 30～70% |
| Temperatura dell'acqua di raffreddamento | 15～20℃ | 15～20℃ | 15～20℃ |
| Cooling water flow | 30L/min@15~20℃ | 15L/min@15~20℃ | 15L/min@15~20℃ |
| Circuit breaker | 100A | ||
| Process temperature control | Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm | ||
| Peso | 600kg | ||
| Dimensions | 600*1000*1700 | ||
| Modello | FLT-215W/ETCU-015W/ETCU-008W | ||
| Pipeline | Channel 1 | Channel 2 | Channel 3 |
| Intervallo di temperatura | -20℃～+50℃ | +30℃～+100℃ | +30℃～+40℃ |
| Precisione del controllo della temperatura | ±0.1℃ | ±0.1℃ | ±0.1℃ |
| Capacità di raffreddamento | 15kW@-10℃ | 13kW@PCW+15℃ | 8kW@PCW+10℃ |
| Heating capacity | 2kW | 6kW | Pump Heat Loss |
| Heat transfer medium flow | 30L/min@0.85MPa | 30L/min@0.85MPa | 20L/min@0.8MPa |
| Heat transfer medium interface | ZG3/4 | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35 ℃ | 10～35 ℃ | 10～35 ℃ |
| Ambient humidity | 30～70% | 30～70% | 30～70% |
| Temperatura dell'acqua di raffreddamento | 15～20℃ | 15～20℃ | 15～20℃ |
| Cooling water flow | 30L/min@15~20℃ | 15L/min@15~20℃ | 15L/min@15~20℃ |
| Circuit breaker | 75A | ||
| Process temperature control | Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm | ||
| Peso | 600kg | ||
| Dimensions | 600*1000*1700 | ||
| Modello | FLTZ-203W/2T Dual system | FLTZ-305W/2T Dual system | FLTZ-406W/2T Dual system | |||
| Intervallo di temperatura | -20℃~90℃ | -30℃~90℃ | -45℃~90℃ | |||
| Precisione del controllo della temperatura | ±0.1℃ | |||||
| Flow control and pressure | 15~45l/min 6bar max | |||||
| Riscaldamento | 2,5kw | 2,5kw | 2,5kw | 2,5kw | 3.5kw | 3.5kw |
| Capacità di raffreddamento | 3KW at-15℃ | 3KW at-15℃ | 5KW at-15℃ | 5KW at-15℃ | 2.5KW at -35℃ | 2.5KW at -35℃ |
| Volume del liquido di circolazione interno | 5L | 5L | 8L | 8L | 8L | 8L |
| Volume del vaso di espansione | 15L | 25L | 25L | |||
| Heat transfer medium | Fluorination, antifreeze, thermal silicone oil, etc. | |||||
| Refrigerante | R404A/ R448 | |||||
| Heat transfer medium interface | ZG3/4 | |||||
| Interfaccia acqua di raffreddamento | ZG3/4 | |||||
| Acqua di raffreddamento | 50L/min at20℃ | 600L/min at20℃ | 50L/min at20℃ | |||
| Alimentazione | Three-phase220V / Three-phase 400V /Three-phase 460V | |||||
| Process temperature control | Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm | |||||
Descrizione del prodotto
Multi-channel independent temperature control can have separate temperature ranges, cooling and heating capabilities, heat transfer medium flow, etc. Two independent systems are used. Steam compression refrigeration or ETCU compressor-free heat exchange system can be selected according to the required temperature range. The system can use expansion tanks, condensers, cooling water systems, etc., which can effectively reduce equipment size and reduce operating steps.
refrigeratori che controllano la temperatura di lavorazione sulle apparecchiature Fab
Raffreddatore a canale singolo raffreddato ad aria, progettato principalmente per le macchine di incisione. Viene utilizzato per fornire un controllo indipendente della temperatura delle pareti laterali della camera.
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